JPS6228838U - - Google Patents

Info

Publication number
JPS6228838U
JPS6228838U JP11645685U JP11645685U JPS6228838U JP S6228838 U JPS6228838 U JP S6228838U JP 11645685 U JP11645685 U JP 11645685U JP 11645685 U JP11645685 U JP 11645685U JP S6228838 U JPS6228838 U JP S6228838U
Authority
JP
Japan
Prior art keywords
plasma generation
plasma
tube
furnace
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11645685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425222Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11645685U priority Critical patent/JPH0425222Y2/ja
Publication of JPS6228838U publication Critical patent/JPS6228838U/ja
Application granted granted Critical
Publication of JPH0425222Y2 publication Critical patent/JPH0425222Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP11645685U 1985-07-31 1985-07-31 Expired JPH0425222Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11645685U JPH0425222Y2 (en]) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11645685U JPH0425222Y2 (en]) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6228838U true JPS6228838U (en]) 1987-02-21
JPH0425222Y2 JPH0425222Y2 (en]) 1992-06-16

Family

ID=31001061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11645685U Expired JPH0425222Y2 (en]) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPH0425222Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516806A (ja) * 2003-01-30 2006-07-06 アクセリス テクノロジーズ インコーポレーテッド 螺旋コイル結合形のリモートプラズマ源
JP2014522277A (ja) * 2011-06-03 2014-09-04 コリア・ベーシック・サイエンス・インスティテュート 医療用プラズマ滅菌装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516806A (ja) * 2003-01-30 2006-07-06 アクセリス テクノロジーズ インコーポレーテッド 螺旋コイル結合形のリモートプラズマ源
JP2014522277A (ja) * 2011-06-03 2014-09-04 コリア・ベーシック・サイエンス・インスティテュート 医療用プラズマ滅菌装置
US9855354B2 (en) 2011-06-03 2018-01-02 Korea Basic Science Institute Apparatus for medical sterilization using plasma

Also Published As

Publication number Publication date
JPH0425222Y2 (en]) 1992-06-16

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